鐳射系統(tǒng) 1 鐳射頭laser head neww***e 鐳射系統(tǒng) 2 鐳射種類laser type YAG Laser 3 鐳射波長laser w***elength 1064nm 4 鐳射功率laser power 0.6mj/purse 5 發(fā)振頻率vibration frequency 1-20HZ 6 冷卻方法cooling method 氣冷式 7 flash lamp life time 一年或大于1000000shots 8 輸出能量控制output power control 512 steps for 0-100% Hi/Low switch-able 9 鐳射發(fā)振器保固期warranty period 一年 10 介面interface RS-232 光學(xué)影像系統(tǒng)Optical imaging system 1 顯微鏡microscope 觀測/鐳射加工專用型 2 CCD 1/2" Color CCD 3 落射光源Catoptric light source 高亮度鹵素光源系統(tǒng)(100W) 4 物鏡切換系統(tǒng)Objective switched systems 4孔/手動切換式 5 精密物鏡組Precision optical lens group 5倍、10倍、20倍、50倍 XYZ軸驅(qū)動系統(tǒng)XYZ axis drive system 1 XY軸有效行程XY axis effective tr***el 570mm*330mm 2 XY軸驅(qū)動形式XY axis driving types 手動 3 XY軸***小解析度XY axis resolution 1um/pulse 4 重現(xiàn)性reproducibility 小于等于5um 5 Z軸***大行程Z axis largest tr***el 90mm 6 Z軸驅(qū)動形式Z axis driving types 手動 7 Z軸***小解析度Z axis resolution 0.1um/pulse 操作模式Operating mode 1 面板尺寸Panel size 24寸 2 操作方式operating mode 鐳射手動操作擊發(fā) 載臺及避震系統(tǒng)plat and suspension 1 材質(zhì)material 精密研磨光學(xué)玻璃平臺 2 尺寸size 570mm*330mm 3 底座bottom support 精密鋼構(gòu)底座 4 避震形式Suspension form 氣壓式避震 5 自然頻率natural frequency 2-2.3Hz 6 廠家供氣規(guī)格factory supply specificati*** 4-6kg/c㎡